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Polymer-based semiconductor wafer cleaning: The roles of organic acid, processing solvent, and polymer hydrophobicity

Seong Hoon Yu; Hayoung Jeon; Hyunki Ko; Ji Hoon Cha; Soyeon Jeon; Mingyu Jae; Geon-Hee Nam; Kyoungsuk Kim; Yeongjin Gil; Kuntack Lee; Dae Sung Chung
Chemical Engineering Journal · Vol. 470 · pp. 144102 · 2023

Abstract

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Bibliographic Information

JournalChemical Engineering Journal
PublisherElsevier
Publication Date2023-08-01
Publication Year2023
Volume470
Pages144102
Document TypeJournal Article
eISSN1385-8947
DOI10.1016/j.cej.2023.144102
SubjectEnvironmental Science

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NARA Access Coverage1997-01-01~Current
Journal Homepagehttps://www.sciencedirect.com/science/journal/13858947
Publisher PageOpen Publisher Page
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