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Multiscale CFD modelling for conformal atomic layer deposition in high aspect ratio nanostructures

Yuanxiao Chen; Zoushuang Li; Ziao Dai; Fan Yang; Yanwei Wen; Bin Shan; Rong Chen
Chemical Engineering Journal · Vol. 472 · pp. 144944 · 2023

Abstract

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Bibliographic Information

JournalChemical Engineering Journal
PublisherElsevier
Publication Date2023-09-01
Publication Year2023
Volume472
Pages144944
Document TypeJournal Article
eISSN1385-8947
DOI10.1016/j.cej.2023.144944
SubjectEnvironmental Science

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NARA Access Coverage1997-01-01~Current
Journal Homepagehttps://www.sciencedirect.com/science/journal/13858947
Publisher PageOpen Publisher Page
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