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Extremely high selective Si1−xGex-film wet etchant generating highly dissolved oxygen via peracetic acid oxidant for lateral gate-all-around FETs with a logic node of less than 3-nm

Seung-Jae Lee; Ji-Eun Lee; Chang-Jin Lee; Ji-Hoon Kim; Ji-Hun Kim; Min-Won Kim; Ji-Ho Choi; Ui-Hyun Jeong; Jea-Gun Park
Chemical Engineering Journal · Vol. 475 · pp. 146257 · 2023

Abstract

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Bibliographic Information

JournalChemical Engineering Journal
PublisherElsevier
Publication Date2023-11-01
Publication Year2023
Volume475
Pages146257
Document TypeJournal Article
eISSN1385-8947
DOI10.1016/j.cej.2023.146257
SubjectEnvironmental Science

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NARA Access Coverage1997-01-01~Current
Journal Homepagehttps://www.sciencedirect.com/science/journal/13858947
Publisher PageOpen Publisher Page
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