NARA Discovery
Article Details
← Back to Search Results
Journal Article

Mass transfer analysis of a concentration-regulated metal-assisted chemical etching system and its application in Si nanohole fabrication

Jiecai Long; Xuan Zhang; Haojun Zhang; Haoya Wang; Congkai Xie; Xun Chen; Guohuai Lin; Yun Chen; Xin Chen; Huitao Liu; Renquan Lu
Chemical Engineering Journal · Vol. 513 · pp. 162997 · 2025
View Full Text Download RIS Journal Homepage

Abstract

Abstract is unavailable.

Bibliographic Information

JournalChemical Engineering Journal
PublisherElsevier
Publication Date2025-06-01
Publication Year2025
Volume513
Pages162997
Document TypeJournal Article
eISSN1385-8947
DOI10.1016/j.cej.2025.162997
SubjectEnvironmental Science

Access Information

NARA Access Coverage1997-01-01~Current
Journal Homepagehttps://www.sciencedirect.com/science/journal/13858947
Publisher PageOpen Publisher Page
Full-text access depends on NARA's subscribed coverage and institutional access.