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Quantitative modeling of substrate velocity effects on deposition efficiency and precursor consumption in spatial ALD

Geng Ma; Zhaojie Wang; Yuan Gao; Zoushuang Li; Xuewei Jiang; Yanwei Wen; Bin Shan; Fan Yang; Rong Chen
Chemical Engineering Journal · Vol. 517 · pp. 164236 · 2025
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Bibliographic Information

JournalChemical Engineering Journal
PublisherElsevier
Publication Date2025-08-01
Publication Year2025
Volume517
Pages164236
Document TypeJournal Article
eISSN1385-8947
DOI10.1016/j.cej.2025.164236
SubjectEnvironmental Science

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NARA Access Coverage1997-01-01~Current
Journal Homepagehttps://www.sciencedirect.com/science/journal/13858947
Publisher PageOpen Publisher Page
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