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Applying acoustic sensing technology to measure and control the delivery of precursor vapors in FCCVD systems

Mingrui L. Gong; Eldar Khabushev; Ana Victoria Benavides-Figueroa; Arthur W.N. Sloan; Jui Junnarkar; Muxiao Li; Joe F. Khoury; Glen C. Irvin; Matteo Pasquali
Chemical Engineering Journal · Vol. 524 · pp. 169461 · 2025
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Bibliographic Information

JournalChemical Engineering Journal
PublisherElsevier
Publication Date2025-11-01
Publication Year2025
Volume524
Pages169461
Document TypeJournal Article
eISSN1385-8947
DOI10.1016/j.cej.2025.169461
SubjectEnvironmental Science

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NARA Access Coverage1997-01-01~Current
Journal Homepagehttps://www.sciencedirect.com/science/journal/13858947
Publisher PageOpen Publisher Page
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