Epitaxial high-entropy relaxor ferroelectric films for flexible piezoelectric sensors and MEMS - Yu-En Pan; Yu-Hao Tu; Li-Hui Tsao; Yu-Ju Lin; Sheng-Yao Hung; Yi-Chun Chen; Mengyao Xiao; Qibin Zeng; Huajun Liu; Chengkuo Lee; Ying-Hao Chu (Chemical Engineering Journal, 2026)