Obstacles and bottleneck breakthroughs affecting the development of hydroxyl radicals assisted chemical mechanical polishing - Xingwang Xu; Bin Lin; Haopeng Chen; Bingrui Lv; Jinming Li; Pengcheng Zhao; Jingguo Zhou; Junqing Jia; Tianyi Sui; Jieqiong Lin (Journal of Environmental Chemical Engineering, 2025)