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Recovery of fluoride toward sustainable integrated circuit manufacturing: Quantifying water–energy–carbon–fluorine footprints in China

Peifan Yao; Qizhen Wang; Qi Tian; Jianhua Wu; Sen Zhang; Lackson Chisanu; Elvira Akhmadieva; Dingyi Li; Bin Li; Jun Zhao; Guangren Qian; Kerstin Kuchta
Journal of Cleaner Production · Vol. 554 · pp. 148090 · 2026
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Bibliographic Information

JournalJournal of Cleaner Production
PublisherElsevier
Publication Date2026-04-01
Publication Year2026
Volume554
Pages148090
Document TypeJournal Article
eISSN0959-6526
DOI10.1016/j.jclepro.2026.148090
SubjectEnvironmental Science

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NARA Access Coverage1993-01-01~Current
Journal Homepagehttps://www.sciencedirect.com/science/journal/09596526
Publisher PageOpen Publisher Page
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