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Auto-optimized interpretable machine learning for terminal water quality prediction of the ultrapure water production system in the semiconductor industry: demonstration in a full-scale system

Yudi Li; Shilong Jiang; Yinhu Wu; Hanying Cai; Cong Jiang; Jianglei Xiong; Hongying Hu
Journal of Cleaner Production · Vol. 575 · pp. 149242 · 2026
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Bibliographic Information

JournalJournal of Cleaner Production
PublisherElsevier
Publication Date2026-09-01
Publication Year2026
Volume575
Pages149242
Document TypeJournal Article
eISSN0959-6526
DOI10.1016/j.jclepro.2026.149242
SubjectEnvironmental Science

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NARA Access Coverage1993-01-01~Current
Journal Homepagehttps://www.sciencedirect.com/science/journal/09596526
Publisher PageOpen Publisher Page
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