Piezoelectric-photocatalysis assisted chemical mechanical polishing: A cost-effective and efficient approach to atomic-scale processing of RS-SiC surfaces - Xingwang Xu; Jiayi Liu; Bin Lin; Tianyi Sui; Jinming Li; Bingrui Lv; Pengcheng Zhao; Hetian Hou; Cong Chen; Hualong Zhang; Yuhao Zhang; Jinhua Wei; et al. (Journal of Environmental Chemical Engineering, 2026)