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Flexible nanoimprint lithography enables high-throughput manufacturing of bioinspired microstructures on warped substrates for efficient III-nitride optoelectronic devices

Siyuan Cui; Ke Sun; Zhefu Liao; Qianxi Zhou; Leonard Jin; Conglong Jin; Jiahui Hu; Kuo-Sheng Wen; Sheng Liu; Shengjun Zhou
Science Bulletin · Vol. 69, Issue 13 · pp. 2080-2088 · 2024
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Abstract

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Bibliographic Information

JournalScience Bulletin
PublisherElsevier
Publication Date2024-07-01
Publication Year2024
Volume69
Issue13
Pages2080-2088
Document TypeJournal Article
eISSN2095-9273
DOI10.1016/j.scib.2024.04.030
SubjectEarth and Planetary Sciences

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NARA Access Coverage2026-03-01~2026-03-01
Journal Homepagehttps://www.sciencedirect.com/science/journal/20959273
Publisher PageOpen Publisher Page
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