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Ultrathin Sn-doped Ga2O3 for power field-effect transistors: Si-compatible 4-inch array with high-k gate dielectric

Zi-Chun Liu; Jia-Cheng Li; Hui-Xia Yang; Han Yang; Yuan Huang; Yi-Yun Zhang; Pui-To Lai; Yuan-Xiao Ma; Ye-Liang Wang
Science Bulletin · Vol. 69, Issue 12 · pp. 1848-1851 · 2024
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Bibliographic Information

JournalScience Bulletin
PublisherElsevier
Publication Date2024-06-01
Publication Year2024
Volume69
Issue12
Pages1848-1851
Document TypeJournal Article
eISSN2095-9273
DOI10.1016/j.scib.2024.04.059
SubjectEarth and Planetary Sciences

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NARA Access Coverage2026-03-01~2026-03-01
Journal Homepagehttps://www.sciencedirect.com/science/journal/20959273
Publisher PageOpen Publisher Page
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