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Inorganic acid and ammonia emission factors in semiconductor processes

Fu-Yun Chen; Ming-Peng Yeh; Sher Ling Lee; Tony Chen; Tzu-Sou Chuang; Hui-Hsin Tseng; Kuo-Lun Tung
Science of The Total Environment · Vol. 999 · pp. 180339 · 2025

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Bibliographic Information

JournalScience of The Total Environment
PublisherElsevier
Publication Date2025-10-01
Publication Year2025
Volume999
Pages180339
Document TypeJournal Article
eISSN0048-9697
DOI10.1016/j.scitotenv.2025.180339
SubjectEnvironmental Science

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NARA Access Coverage1972-05-01~Current
Journal Homepagehttps://www.sciencedirect.com/science/journal/00489697
Publisher PageOpen Publisher Page
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