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Obstacles and bottleneck breakthroughs affecting the development of hydroxyl radicals assisted chemical mechanical polishing

Xingwang Xu; Bin Lin; Haopeng Chen; Bingrui Lv; Jinming Li; Pengcheng Zhao; Jingguo Zhou; Junqing Jia; Tianyi Sui; Jieqiong Lin
Journal of Environmental Chemical Engineering · Vol. 13, Issue 6 · pp. 119567 · 2025
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Bibliographic Information

JournalJournal of Environmental Chemical Engineering
PublisherElsevier
Publication Date2025-12-01
Publication Year2025
Volume13
Issue6
Pages119567
Document TypeJournal Article
eISSN2213-3437
DOI10.1016/j.jece.2025.119567
SubjectEnvironmental Science

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NARA Access Coverage2013-06-01~Current
Journal Homepagehttps://www.sciencedirect.com/science/journal/22133437
Publisher PageOpen Publisher Page
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