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Piezoelectric-photocatalysis assisted chemical mechanical polishing: A cost-effective and efficient approach to atomic-scale processing of RS-SiC surfaces

Xingwang Xu; Jiayi Liu; Bin Lin; Tianyi Sui; Jinming Li; Bingrui Lv; Pengcheng Zhao; Hetian Hou; Cong Chen; Hualong Zhang; Yuhao Zhang; Jinhua Wei; Haoji Wang; Mingqiang Tang
Journal of Environmental Chemical Engineering · Vol. 14, Issue 5 · pp. 124645 · 2026
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Bibliographic Information

JournalJournal of Environmental Chemical Engineering
PublisherElsevier
Publication Date2026-10-01
Publication Year2026
Volume14
Issue5
Pages124645
Document TypeJournal Article
eISSN2213-3437
DOI10.1016/j.jece.2026.124645
SubjectEnvironmental Science

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NARA Access Coverage2013-06-01~Current
Journal Homepagehttps://www.sciencedirect.com/science/journal/22133437
Publisher PageOpen Publisher Page
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